Flexible, CMOS-Compatible PEALD-Grown MoS2 Memristive E-Skin Arrays for In-Sensor Neuromorphic Computing

Objective

This project, FLECS-2D (FLExible CMOS-compatible e-skin Sensors based on 2D MoS2 memristors), aims to pioneer a new class of flexible neuromorphic devices by integrating low-temperature ALD-grown MoS2 memristors with tactile sensing arrays on polymer substrates. The central innovation lies in combining atomic-level control of 2D material synthesis with monolithic in-sensor computing architectures, enabling local learning and perception directly on flexible platforms. Unlike conventional CVD or exfoliated MoS2 approaches, which lack scalability and CMOS compatibility, this project employs plasma-enhanced ALD (<200 °C) to achieve uniform, defect-minimized MoS2 films on thermally sensitive substrates, ensuring industrial relevance and integration with silicon back-end processes. The fabricated devices will emulate biological synaptic behaviors such as long-term potentiation/depression and spike-timing dependent plasticity (STDP), enabling energy-efficient, event-driven computing critical for edge-AI, robotics, wearables, and biomedical electronics. The demonstration of 4×4 and 8×8 e-skin arrays will validate scalability, mechanical resilience, and real-time signal processing capabilities—offering a disruptive pathway towards ultra-low-power, adaptive electronics. Aligned with the European Green Deal and Digital Decade goals, the project addresses sustainability through low-temperature, low-energy fabrication methods and contributes to EU leadership in green, secure, and trustworthy digital technologies. It resonates with the Horizon Europe Cluster 4 priorities, advancing next-generation semiconductors and smart systems while reinforcing Europe’s independence in critical technologies. Beyond scientific impact, FLECS-2D provides societal and economic benefits: reducing energy demands of data processing, enabling soft electronics for healthcare and prosthetics, and supporting Europe’s transition to a sustainable, digital, and human-centric future.